DocumentCode
2171915
Title
Volume manufacturing of 0.6 eV bandgap thermophotovoltaic devices on InAsP lattice mismatched buffers by MBE
Author
Bird, T.E. ; Sheldon, M. ; Bresnahan, R.C. ; O´Steen, M.L. ; Gotthold, D.W. ; Wernsman, B. ; Link, S.D. ; Messham, R.L.
Author_Institution
Process Integration Center, Veeco Instrum. Inc., Saint Paul, MN, USA
fYear
2005
fDate
8-12 May 2005
Firstpage
98
Lastpage
101
Abstract
We report on scaling high efficiency In0.68Ga0.32As thermophotovoltaic devices on InP from a single wafer research reactor to a 7×3" production reactor utilizing step-graded InAsyP(1-y) lattice mismatched buffers. We\´ll present uniformity, reproducibility and device results.
Keywords
III-V semiconductors; buffer layers; gallium arsenide; indium compounds; lattice constants; molecular beam epitaxial growth; thermophotovoltaic cells; 0.6 eV; In0.68Ga0.32As; InAsP; InP; MBE; high efficiency In0.68Ga0.32As thermophotovoltaic device scaling; production reactor; single wafer research reactor; step-graded InAsP lattice mismatched buffers; volume manufacturing; Birds; Gallium arsenide; Indium gallium arsenide; Indium phosphide; Inductors; Lattices; Manufacturing; Photonic band gap; Production; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2005. International Conference on
ISSN
1092-8669
Print_ISBN
0-7803-8891-7
Type
conf
DOI
10.1109/ICIPRM.2005.1517429
Filename
1517429
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