Title :
Systematic Experimental and Numerical Characterization of Integrated Spiral Inductors in Silicon RF ICs
Author :
Palazzari, V. ; Placidi, P. ; Stopponi, G. ; Alimenti, F. ; Scorzoni, A. ; Roselli, L.
Author_Institution :
DIEI, UniversitÃ\xa0 di Perugia, via G. Duranti 93, 06125 Perugia, Italy. Tel: +39-75-585.3636, Fax: +39-75-585.3654
Abstract :
A systematic discussion of the main strategies available to improve the performance of silicon integrated inductors is carried out, relying on on-chip measurement related to a specific CMOS technology. Then, a "full-wave" electromagnetic simulator has been customized and validated for the accurate characterization of devices of interest. Finally, such a capability has been applied to extend the discussion to a different foundry process.
Keywords :
CMOS technology; Coils; Degradation; Electromagnetic induction; Inductors; Radio frequency; Shape; Silicon; Spirals; Substrates;
Conference_Titel :
Microwave Conference, 2002. 32nd European
Conference_Location :
Milan, Italy
DOI :
10.1109/EUMA.2002.339375