DocumentCode
2173744
Title
Tunable interdigital coplanar filters using MEMS capacitors
Author
Blondy, P. ; Pothier, A. ; Fourn, E. ; Champeaux, C. ; Tristant, P. ; Catherinot, A. ; Tanné, G. ; Rius, E. ; Person, C. ; Huret, F.
Author_Institution
I.R.C.O.M. - UMR CNRS N°6615 - 87060 LIMOGES CEDEX - FRANCE - TEL: 33 555 457 731. pblondy@ircom.unilim.fr
fYear
2002
fDate
23-26 Sept. 2002
Firstpage
1
Lastpage
4
Abstract
This paper presents a switchable interdigital coplanar filter with tapped-line feedings using MEMS capacitors. Center frequency shift is obtained by adding a piece of line at the end of each basic resonator. The connection between these two elements is realized by MEMS capacitors used as an ON/OFF switches with a high-capacitance ratio between the two states. A two pole switchable filter has been designed, fabricated and measured. The center frequency can be discreetly tuned from 18.55 to 21.05 GHz with low return losses (about 15 dB) and low insertion losses (about 3.5 dB).
Keywords
Capacitance; Capacitors; Fabrication; Frequency; Gold; Insertion loss; Micromechanical devices; Resonator filters; Tunable circuits and devices; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2002. 32nd European
Conference_Location
Milan, Italy
Type
conf
DOI
10.1109/EUMA.2002.339406
Filename
4140486
Link To Document