Title :
A Millimeter-wave Tunable Filter Using MEMS Varactors
Author :
Abbaspour-Tamijani, Abbas ; Dussopt, Laurent ; Rebeiz, Gabriel M.
Author_Institution :
The Radiation Laboratory, University of Michigan, 3228 EECS Building, Beal Avenue, Ann Arbor, MI 48109-2122, USA. Phone: 734 763-4185, Fax: 734 647-2106, E-mail: abbasa@engin.umich.edu
Abstract :
A mm-wave tunable 3-pole filter was developed using high-Q MEMS varactors on a quartz substrate using a coplanar-waveguide (CPW) implementation. The measured tuning range was 23.8 GHz (0 V) to 22.6 GHz (15 V) with an associated insertion loss of ¿2.8 dB to ¿3.8 dB, and a return loss better than ¿12 dB over the entire tuning range. The measured 1-dB bandwidth was 8.4% at 23.8 GHz and 6.6% at 22.6 GHz. The extracted capacitance change in the analog MEMS varactors is 1.20. These numbers represent the best results achieved to-date for tunable filters. A larger tuning range can be obtained with the new of high-capacitance ratio varactors (2:1).
Keywords :
Band pass filters; Bridge circuits; Capacitance; Circuit topology; Coplanar waveguides; Micromechanical devices; Resonance; Tunable circuits and devices; Tuning; Varactors;
Conference_Titel :
Microwave Conference, 2002. 32nd European
Conference_Location :
Milan, Italy
DOI :
10.1109/EUMA.2002.339409
