Title :
A dry silver electromigration process to fabricate optical waveguides on glass substrates
Author :
Chuang, Ricky W. ; Lee, Chin C.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Irvine, CA, USA
Abstract :
We present an improved method to fabricate low-loss waveguides on glass without the use of molten salts or liquid solutions. Preliminary results obtained so far are reported. This technique encompasses a dry silver ion migration process assisted by applied electric field. The waveguides thus fabricated showed no discolors or cracks, a well-known problem commonly incurred if molten nitrate process was used. The fabrication principle is based on driving silver ions from a solid source into the glass using an applied electric field, and at the same time moving the sodium ions out of substrate along the direction of the applied electrical field to maintain charge neutrality inside the glass. As a result, sodium ions are replaced by silver ions. In this experiment, high quality silver films approximately 1 μm thick were electron-beam deposited on sodalime slide glass in high vacuum (~10-7 Torrs). An electromigration process was then initiated by applying the voltage between the top and bottom surfaces of glass that was heated to about 230°C. After a while, the silver film showed sign of being depleted during the diffusion/drift process as the ionic current started to decrease. This is a clear indication that silver ions were indeed driven into the glass. Based on the measurements and calculation of the current, the time, along with the sodium concentration, the waveguide depth is estimated to be 6 μm. The optical characterization of the waveguide was conducted with a 0.6328 μm He-Ne laser. The laser beam was coupled into and out of the waveguide using two prisms of high index of refraction. Data subsequently obtained from the prism coupling technique includes propagation mode patterns and index change associated with the waveguide region. Both the fabrication process as well as waveguide properties will also be presented. Fabrication of waveguides on BK7 optical glass is also underway
Keywords :
Electromigration; Ion exchange; Optical fabrication; Optical glass; Optical waveguides; Silver; Ag; dry silver electromigration process; fabrication; glass substrate; ion exchange; optical waveguide; Electromigration; Glass; Laser modes; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Particle beam optics; Silver; Waveguide lasers;
Conference_Titel :
Electronic Components & Technology Conference, 2000. 2000 Proceedings. 50th
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-5908-9
DOI :
10.1109/ECTC.2000.853414