DocumentCode
2174344
Title
Characterizations of Rectangular Coaxial Line Fabricated on Silicon Substrate
Author
Xiong, Yong Zhong ; Huailin, Liao ; Jinglin, Shi ; Rustagi, Subhash C.
Author_Institution
VSLI Circuit Design & Test Department, Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685. Tel: (65) 6770-5379, Fax: (65)67745754, e-mail: yongzhong@ime.a-star.edu.sg
fYear
2002
fDate
23-26 Sept. 2002
Firstpage
1
Lastpage
4
Abstract
Miniature Rectangular Coaxial Lines (RCL) fabricated on silicon substrate using standard silicon 0.18um CMOS processing technologies are achieved. Also a valid method for de-embedding test structure is proposed. The measured results show that the insertion loss of 1.7dB/mm and the return loss of 10dB at 20GHz are obtained. It is believed that the RCL with high isolation and low insertion loss will be very useful for high performance and low cost silicon-based RFIC design.
Keywords
CMOS process; CMOS technology; Coaxial components; Costs; Insertion loss; Isolation technology; Loss measurement; Performance loss; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2002. 32nd European
Conference_Location
Milan, Italy
Type
conf
DOI
10.1109/EUMA.2002.339429
Filename
4140509
Link To Document