Design of a CMOS-MEMS Diffraction Grating for Near-Infrared Spectroscopy of Biomolecules

Author

Losoya-Leal, A. ; Camacho-León, S. ; Martínez-Chapa, S.O.

Author_Institution

Dept. of Electr. & Comput. Eng., Tecnol. de Monterrey (ITESM), Monterrey, Mexico

fYear

2010

fDate

Sept. 28 2010-Oct. 1 2010

Firstpage

737

Lastpage

740

Abstract

This paper discusses the design of a CMOS-MEMS diffraction grating for a micro spectrophotometer with application in non-invasive glucose monitoring based on differential near-infrared spectro photometry. There are typically two factors discussed with respect to diffraction gratings: spectral range and optical resolution. An analysis of the tradeoff between these two parameters was performed for the determination of the geometric characteristics of our grating based on the limitations of the CMOS process.

Keywords

bioMEMS; diffraction gratings; molecular biophysics; patient monitoring; spectrophotometers; spectroscopy; sugar; CMOS-MEMS diffraction grating; biomolecules; geometric characteristics; micro spectrophotometer; near-infrared spectroscopy; noninvasive glucose monitoring; optical resolution; spectral range; Blood; Diffraction; Diffraction gratings; Gratings; Metals; Monitoring; Sugar; CMOS-MEMS; diffraction grating; microspectrophotometer; non-invasive blood glucose monitoring;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Robotics and Automotive Mechanics Conference (CERMA), 2010

Conference_Location

Morelos

Print_ISBN

978-1-4244-8149-1

Type

conf

DOI

10.1109/CERMA.2010.86

Filename

5692427