Title :
Degradation of metamorphic InGaAs Esaki tunnel diodes due to electrode diffusion and impurity interdiffusion
Author :
Ono, Hideki ; Yanagita, Masashi ; Taniguchi, Satoshi ; Suzuki, Toshi-kazu
Author_Institution :
Adv. Devices R&D Dept., Sony Corp., Kanagawa
Abstract :
We have investigated degradation of metamorphic In0.53Ga0.47As Esaki tunnel diodes. The degradation due to electrode diffusion and impurity interdiffusion is more prominent than that of lattice-matched In0.53Ga0.47 As Esaki tunnel diodes
Keywords :
III-V semiconductors; chemical interdiffusion; gallium arsenide; indium compounds; tunnel diodes; InGaAs; degradation; electrode diffusion; impurity interdiffusion; lattice-matched In0.53Ga0.47As Esaki tunnel diodes; metamorphic InGaAs Esaki tunnel diodes; Degradation; Electrodes; Gallium arsenide; Gold; Impurities; Indium gallium arsenide; Lattices; Light emitting diodes; Semiconductor diodes; Substrates;
Conference_Titel :
Indium Phosphide and Related Materials, 2005. International Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-8891-7
DOI :
10.1109/ICIPRM.2005.1517527