DocumentCode :
2176444
Title :
Strain imaging in thermoelectric devices by laser probe shearography
Author :
Jorez, S. ; Dilhaire, S. ; Lopez, L. Patino ; Granby, S. ; Claeys, W. ; Uemura, K.I. ; Stockholm, J.G.
Author_Institution :
CPMOH - Universite de Bordeaux, Talence, France
fYear :
2001
fDate :
2001
Firstpage :
503
Lastpage :
506
Abstract :
We have developed an original optical set-up and method for the measurement of strain in electronic components. We have applied it for the study of thermoelectric devices. The method is based on speckle interferometry imaging called shearography. Two images of a same object lighted by coherent laser light are recorded upon a CCD camera through an appropriate optical system. The two images are slightly shifted one with respect to the other. This allows determining the gradient of normal surface displacement in the direction of the shift. Information taken in this manner in several directions allows to derive a map of a parameter related to the surface displacement gradients that we call "fragility factor"
Keywords :
displacement measurement; electronic speckle pattern interferometry; measurement by laser beam; semiconductor device measurement; strain measurement; thermoelectric devices; CCD camera; coherent laser light; electronic components; fragility factor; laser probe shearography; optical set-up; speckle interferometry; strain imaging; surface displacement; surface displacement gradients; thermoelectric devices; Adaptive optics; Capacitive sensors; Electronic components; Optical devices; Optical imaging; Optical interferometry; Optical recording; Probes; Strain measurement; Thermoelectric devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermoelectrics, 2001. Proceedings ICT 2001. XX International Conference on
Conference_Location :
Beijing
ISSN :
1094-2734
Print_ISBN :
0-7803-7205-0
Type :
conf
DOI :
10.1109/ICT.2001.979941
Filename :
979941
Link To Document :
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