Title :
Improvement of the quality factor of RF integrated inductors by layout optimization
Author :
Lopez-Villegas, J.M. ; Samitier, J. ; Cane, C. ; Losantos, P.
Author_Institution :
Dept. d´Electron., Barcelona Univ., Spain
Abstract :
A systematic method to improve the quality factor of RF integrated inductors is proposed. The method is based on the inductor´s layout optimization, and has been successfully applied to the design of square spiral inductors performed using a silicon based MCM technology and silicon micromachining post processing.
Keywords :
Q-factor; inductors; integrated circuit layout; micromachining; multichip modules; RF integrated inductor; Si; design; layout optimization; micromachining; quality factor; silicon MCM technology; square spiral inductor; Coils; Inductors; Integrated circuit technology; Magnetic flux; Magnetic losses; Q factor; Radio frequency; Silicon; Spirals; Strips;
Conference_Titel :
Radio Frequency Integrated Circuits (RFIC) Symposium, 1998 IEEE
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4439-1
DOI :
10.1109/RFIC.1998.682073
