Title :
Conductive reliability modelling of capacitive MEMS
Author :
Giounanlis, Panagiotis ; McGlynn, Peter ; Blokhina, Elena ; Feely, Orla ; Papaioannou, George
Author_Institution :
School of Electrical, Electronic and Communications Engineering, University College Dublin, Ireland
fDate :
June 29 2015-July 2 2015
Abstract :
Conductive reliability modelling of Capacitive MEMS appears to be a problem of extent complexity due to the presence of the various components of which the system consists. In the current work we discuss a multi-physics modelling which includes all the aspects of the system. Additionally, we provide simulations through an implementation example of a MEMS with a floating electrode which includes a time dependent electromechanical part along with an embedded dynamical model of the current flux in the device. Finally, we compare our results with experimental data.
Keywords :
Capacitance; Dielectrics; Electrodes; Fractals; Integrated circuit modeling; Mathematical model; Micromechanical devices;
Conference_Titel :
Ph.D. Research in Microelectronics and Electronics (PRIME), 2015 11th Conference on
Conference_Location :
Glasgow, United Kingdom
DOI :
10.1109/PRIME.2015.7251397
