• DocumentCode
    2181630
  • Title

    Noise reduction in an optical interferometer for picometer measurements

  • Author

    Fujimoto, H. ; Tanaka, M. ; Nakayama, K.

  • Author_Institution
    Nat. Res. Lab. of Metrol., Ibaraki, Japan
  • fYear
    1994
  • fDate
    June 27 1994-July 1 1994
  • Firstpage
    525
  • Lastpage
    526
  • Abstract
    An optical interferometer with the resolution of picometer level was developed. Several techniques are exploited to reduce the output fluctuation due to the thermal drift, and air movement. The short term noise performance was better than 3 pm.<>
  • Keywords
    interference suppression; laser beam applications; light interferometers; spatial variables measurement; thermal noise; air movement; noise reduction; optical interferometer; output fluctuation; picometer measurement; short term noise performance; thermal drift; Fluctuations; Laser beams; Noise measurement; Noise reduction; Optical beam splitting; Optical interferometry; Optical modulation; Optical noise; Optical sensors; Phase shifting interferometry;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
  • Conference_Location
    Boulder, CO, USA
  • Print_ISBN
    0-7803-1984-2
  • Type

    conf

  • DOI
    10.1109/CPEM.1994.333183
  • Filename
    333183