Title :
Polarization dependent failure analysis for photonic chips based on Silica-on-Silicon
Author :
Weifeng Jiang ; Jianting Qi ; Xiaohan Sun
Author_Institution :
Nat. Res. Center for Opt. Sensing/Commun. Integrated Networking, Southeast Univ., Nanjing, China
Abstract :
Polarization dependent failure analyses for the chips based on Silica-on-Silicon with the cracks in the buffer layer are given by full-vectorial FEM, and the impacts of the cracks on chips performance are tested experimentally.
Keywords :
buffer layers; cracks; elemental semiconductors; finite element analysis; integrated optics; integrated optoelectronics; light polarisation; optical waveguides; ridge waveguides; silicon; silicon compounds; SiO2-Si; buffer layer; cracks; full-vectorial FEM; photonic chips; polarization dependent failure analysis; ridge waveguide structure; silica-on-silicon; Buffer layers; Loss measurement; Optical polarization; Optical sensors; Optical waveguides; Scanning electron microscopy; Semiconductor device measurement;
Conference_Titel :
Avionics, Fiber-Optics and Photonics Conference (AVFOP), 2013 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4244-7346-5
DOI :
10.1109/AVFOP.2013.6661591
