DocumentCode :
2184193
Title :
High-sensitivity humidity sensor utilizing PEDOT/PSS printed quartz crystal microbalance
Author :
Jaruwongrungsee, Kata ; Sriprachuabwong, Chakrit ; Sappat, Assawapong ; Wisitsoraat, Anurat ; Phasukkit, Pattarapong ; Sangworasil, Manas ; Tuantranont, Adisom
Author_Institution :
Nat. Electron. & Comput. Technol. Center, Nanoelectron. & MEMS Lab., Pathumthani, Thailand
fYear :
2011
fDate :
17-19 May 2011
Firstpage :
66
Lastpage :
69
Abstract :
In this work, quartz crystal microbalance humidity sensor was fabricated by inkjet printing technique. Poly (3, 4 ethylenedioxythiophene)/poly-styrene-sulfonic acid (PEDOT7 PSS), one of the most widely used polymer composites, was printed on QCM electrode as sensing layer using Dimatrix material inkjet printer. The main advantage of this coating method is its high precision of solution coating with accurately controlled volume and area. The printed layer was varied from 1 to 20 layers. With 20 PEDOT/PSS printed layers, the humidity sensitivity is found increased by more than three orders of magnitude compared to uncoated QCM. In addition, the PEDOT/PSS coated QCM exhibits fast humidity detection with short response and recovery times. Thus, the PEDOT/PSS printed on the QCM electrode is an effective way to improve humidity-sensing characteristic of QCM.
Keywords :
coatings; composite materials; crystals; electrodes; humidity sensors; ink jet printers; matrix printers; microbalances; microfabrication; polymers; quartz; PEDOT-PSS printed quartz crystal microbalance; QCM electrode; dimatrix material inkjet printer; high-sensitivity humidity sensor; humidity detection; humidity sensitivity; inkjet printing technique; poly(3, 4-ethylenedioxythiophene)-poly-styrene-sulfonic acid; polymer composite; solution coating; Computers; Copper; Humidity; Humidity measurement; Lead; Multiplexing; Thickness measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2011 8th International Conference on
Conference_Location :
Khon Kaen
Print_ISBN :
978-1-4577-0425-3
Type :
conf
DOI :
10.1109/ECTICON.2011.5947772
Filename :
5947772
Link To Document :
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