DocumentCode :
2184708
Title :
The Linear Combination of Bulk Bands-Method for Electron and Hole Subband Calculations in Strained Silicon Films and Surface Layers
Author :
Sverdlov, Viktor ; Baumgartner, Oskar ; Kosina, Hans ; Selberherr, Siegfried ; Schanovsky, Franz ; Esseni, David
Author_Institution :
Inst. for Microelectron., Tech. Univ. Wien, Vienna
fYear :
2009
fDate :
27-29 May 2009
Firstpage :
1
Lastpage :
4
Abstract :
A generalization of the "Linear Combination of Bulk Bands" method for the calculation of the electron and hole subband structure including strain and spin-orbit interaction is presented. Using the full band structure obtained numerically with the empirical pseudopotential method it is demonstrated that, contrary to the effective mass approximation, the unprimed subbands with the same quantum number in a (001) thin silicon film are not equivalent. It is shown that shear strain modifies the subband effective masses and introduces a large splitting between the unprimed subbands. The generalized method provides accurate subband dispersions for holes demonstrating a large potential for applications.
Keywords :
band structure; effective mass; elemental semiconductors; pseudopotential methods; semiconductor thin films; silicon; spin-orbit interactions; Si; effective mass approximation; electron subband calculations; empirical pseudopotential method; hole subband calculations; linear combination of bulk bands-method; quantum number; spin-orbit interaction; strained silicon films; subband dispersions; Capacitive sensors; Charge carrier processes; Effective mass; Electrons; FETs; MOSFETs; Microelectronics; Semiconductor films; Silicon; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Computational Electronics, 2009. IWCE '09. 13th International Workshop on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-3925-6
Electronic_ISBN :
978-1-4244-3927-0
Type :
conf
DOI :
10.1109/IWCE.2009.5091158
Filename :
5091158
Link To Document :
بازگشت