DocumentCode
2184708
Title
The Linear Combination of Bulk Bands-Method for Electron and Hole Subband Calculations in Strained Silicon Films and Surface Layers
Author
Sverdlov, Viktor ; Baumgartner, Oskar ; Kosina, Hans ; Selberherr, Siegfried ; Schanovsky, Franz ; Esseni, David
Author_Institution
Inst. for Microelectron., Tech. Univ. Wien, Vienna
fYear
2009
fDate
27-29 May 2009
Firstpage
1
Lastpage
4
Abstract
A generalization of the "Linear Combination of Bulk Bands" method for the calculation of the electron and hole subband structure including strain and spin-orbit interaction is presented. Using the full band structure obtained numerically with the empirical pseudopotential method it is demonstrated that, contrary to the effective mass approximation, the unprimed subbands with the same quantum number in a (001) thin silicon film are not equivalent. It is shown that shear strain modifies the subband effective masses and introduces a large splitting between the unprimed subbands. The generalized method provides accurate subband dispersions for holes demonstrating a large potential for applications.
Keywords
band structure; effective mass; elemental semiconductors; pseudopotential methods; semiconductor thin films; silicon; spin-orbit interactions; Si; effective mass approximation; electron subband calculations; empirical pseudopotential method; hole subband calculations; linear combination of bulk bands-method; quantum number; spin-orbit interaction; strained silicon films; subband dispersions; Capacitive sensors; Charge carrier processes; Effective mass; Electrons; FETs; MOSFETs; Microelectronics; Semiconductor films; Silicon; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Computational Electronics, 2009. IWCE '09. 13th International Workshop on
Conference_Location
Beijing
Print_ISBN
978-1-4244-3925-6
Electronic_ISBN
978-1-4244-3927-0
Type
conf
DOI
10.1109/IWCE.2009.5091158
Filename
5091158
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