Tools and models for systems design and synthesis of MEMS based on asynchronous circuits

The improvement of micro-technologies in the microelectronics world has allowed the creation of ultra miniaturised devices, which are called MEMS-micro electro mechanical systems or microsystems. A major problem concerns the design of these heterogeneous circuits because it associates disciplines such as electronics, mechanics, chemistry, etc. This paper presents models and tools developed for system design and synthesis of MEMS based on SDL (specification description language), structured analysis for real time (SA-RT) and Petri nets (PN).