Advanced MEMS for photonics

Author

Wu, M.C. ; Patterson, P.R. ; Hah, D. ; Lee, M.-C.M. ; Huang, S. ; Tsai, J.-C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

2002

fDate

24-26 June 2002

Firstpage

13

Lastpage

16

Abstract

Micro-electro-mechanical-systems (MEMS) is a key enabling technology for many new all optical network elements in next-generation photonic networks. With intensive efforts from industry in the last five years, many of these new photonic MEMS components have now moved from research laboratories into commercial reality. Examples include 2D and 3D MEMS optical switches, and wavelength-division-multiplexed (WDM) optical add-drop multiplexers (OADM). In the meantime, research laboratories continue to develop newer photonic MEMS components and technologies. In this talk, we review the state of the art of photonic MEMS components and systems, and describe the development of new photonic MEMS research at UCLA.

Keywords

micromechanical devices; micromirrors; multiplexing equipment; photonic switching systems; wavelength division multiplexing; 2D/3D MEMS optical switches; MEMS; MEMS research/development; WDM OADM; all-optical network elements; micro-electro-mechanical-systems; micromirror arrays; photonic MEMS components; photonic MEMS components/systems; photonic networks; wavelength-division-multiplexed optical add-drop multiplexers; Actuators; Automatic voltage control; Fingers; Laboratories; Microelectromechanical devices; Micromechanical devices; Micromirrors; Optical add-drop multiplexers; Photonics; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2002. 60th DRC. Conference Digest

Conference_Location

Santa Barbara, CA, USA

Print_ISBN

0-7803-7317-0

Type

conf

DOI

10.1109/DRC.2002.1029486

Filename

1029486