Title :
Nanoscale memristors: Devices engineering, CMOS integration and novel applications
Author_Institution :
Nanodevices and Integrated Systems Laboratory, Department of Electrical and Computer Engineering, University of Massachusetts, Amherst, 01003, USA
Abstract :
We scaled the memristor devices in a crossbar arrays down to 8 nm using nanoimprint lithography. With reactive sputtering, we tuned the electrical properties of TiOx based memristors. We developed a silicon oxide device with ultra-thin layer chemically produced oxide that exhibited low voltage and electrode-dependent switching behavior. Finally, we integrated planar memristive devices with CMOS substrates, implementing hybrid circuits with lower switching voltage and better uniformity.
Keywords :
CMOS integrated circuits; Electrodes; Memristors; Optical switches; Silicon; Sputtering; SiOx devices; hybrid circuits; memristor; reactive sputtering; scaling;
Conference_Titel :
Digital Signal Processing (DSP), 2015 IEEE International Conference on
Conference_Location :
Singapore, Singapore
DOI :
10.1109/ICDSP.2015.7252073