DocumentCode
2188976
Title
InP hot electron transistor with a buried metallic gate for electron emission
Author
Miyamoto, Y. ; Yamamoto, R. ; Maeda, H. ; Takeuchi, K. ; Wernersson, L.-E. ; Furuya, K.
Author_Institution
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Japan
fYear
2002
fDate
24-26 June 2002
Firstpage
95
Lastpage
96
Abstract
Transistors with vertical heterostructures are attractive because of their inherent controllability of the propagating distance. However, a heavily doped layer introduces impurity scattering and carrier-carrier scattering in the base layer. To eliminate the doped layer from the active region, we proposed a hot electron transistor (HET) with a buried metallic gate. In this device, the base layer in the hot electron transistor is replaced by an embedded metal grating, which is forward biased in order to extract carriers from the emitter. Data for the conduction band edge when the device is operated is given. An attractive potential in the undoped region is clearly different from a permeable base transistor, which uses doped channel depletion. In this report, we present an InP HET with a buried metallic gate. To reduce leakage current between emitter and gate, we used freestanding tungsten wire. A simple estimation of the device speed is also presented.
Keywords
III-V semiconductors; conduction bands; electron emission; hot electron transistors; indium compounds; leakage currents; semiconductor device measurement; semiconductor device models; 370 GHz; InP; InP hot electron transistors; W; active region doped layer; base layer carrier-carrier scattering; buried metallic gate transistors; device speed estimation; doped channel depletion; electron emission; emitter carrier extraction; emitter/gate leakage current reduction; forward biased HET embedded metal grating; freestanding tungsten wire; heavily doped layers; impurity scattering; operating device conduction band edge; permeable base transistors; propagating distance controllability; undoped region potential; vertical heterostructure transistors; Controllability; Data mining; Electron emission; Gratings; Impurities; Indium phosphide; Leakage current; Scattering; Tungsten; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2002. 60th DRC. Conference Digest
Conference_Location
Santa Barbara, CA, USA
Print_ISBN
0-7803-7317-0
Type
conf
DOI
10.1109/DRC.2002.1029531
Filename
1029531
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