DocumentCode
2190045
Title
Development of cylindrical two-dimensional linear oscillatory actuator
Author
Honda, Yukari ; Torii, Susumu ; Ebihara, Daiki ; Hasegawa, Yuya ; Hirata, Katsuhiro
Author_Institution
Dept. of Electr. & Electron. Eng., Musashi Inst. of Technol., Tokyo
fYear
2006
fDate
23-26 May 2006
Firstpage
260
Lastpage
265
Abstract
In the industrial world, the actuator that carries out a multi-dimension drive and simple structure is rapidly performed. The actuator that operates the direction of z-thetas is needed in the manufacturing processes such as semiconductors and the liquid crystals. In this paper, the construction of the two-dimensional oscillatory actuator with magnetic attractive force is proposed and designed. The basic characteristics of the flux density are measured to analyze this actuator
Keywords
DC motors; electric actuators; cylindrical two-dimensional linear oscillatory actuator; flux density; liquid crystals; manufacturing processes; multi-dimension drives; Attenuation; Difference equations; Hydraulic actuators; Magnetic resonance; Reliability engineering; Resonant frequency; Shafts; Springs; Stators; Torque;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Electronics, Electrical Drives, Automation and Motion, 2006. SPEEDAM 2006. International Symposium on
Conference_Location
Taormina
Print_ISBN
1-4244-0193-3
Type
conf
DOI
10.1109/SPEEDAM.2006.1649781
Filename
1649781
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