Title :
Influence of post heat treatment to the properties of ZnO thin film prepared by RF magnetron sputtering
Author :
Md Sin, N.D. ; Abdul Aziz, Azlan ; Ahmad, Sahar ; Musa, M.Z. ; Mamat, M.H. ; Rusop, M.
Author_Institution :
NANO-Electron. Centre, Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
Abstract :
The influence of post heat treatment on ZnO thin films prepared by RF magnetron sputtering was reported. The effect of ZnO thin films post heat treatment were varies from 300°C to 550°C had been investigated. The thin films were examined using two point probe current-voltage (I-V) measurement (Keithley 2400), UV-Vis-NIR spectrophotometer, field emission scanning electron microscopy (FESEM) (JEOL JSM 7600F). The current-voltage (I-V) measurements indicated that the conductivity of post heat treatment temperature of 500°C give the optimum conductivity. All films exhibited high UV absorption (300~380nm) properties and had low absorbance in visible and near infrared (IR) (380~1200nm) region that obtained from UV-Vis-NIR spectrophotometer measurement. The observed image from FESEM shows an increase of the nanocolumnar size, as the post heat treatment increases.
Keywords :
II-VI semiconductors; electrical conductivity; field emission electron microscopy; heat treatment; infrared spectra; scanning electron microscopy; semiconductor growth; semiconductor thin films; sputter deposition; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; FESEM; RF magnetron sputtering; UV absorption properties; UV-vis-nir spectrophotometer measurement; ZnO; ZnO thin film preparation; current-voltage measurements; electrical conductivity; field emission scanning electron microscopy; heat treatment; nanocolumnar size; near infrared region; point probe current-voltage measurement; temperature 300 degC to 550 degC; thin film properties; visible region; wavelength 300 nm to 1200 nm; ZnO thin films; electrical properties; optical properties; post heat treatment; structural properties;
Conference_Titel :
Research and Development (SCOReD), 2012 IEEE Student Conference on
Conference_Location :
Pulau Pinang
Print_ISBN :
978-1-4673-5158-4
DOI :
10.1109/SCOReD.2012.6518617
