DocumentCode
2190210
Title
Direct linear drives for the application in high vacuum
Author
Budig, Peter- Klaus
Author_Institution
EAAT GmbH Chemnitz
fYear
2006
fDate
23-26 May 2006
Firstpage
284
Lastpage
291
Abstract
High-vacuum application demands for clean-room conditions. Therefore there is no chance to use roller bearings, air-cushion bearings or even slide bearings. On the other side making motion must be made without mechanical contact f.i. as in a rail-wheel system or similar. Therefore a design was chosen with a permanent magnetic bearing and a linear- drive system
Keywords
linear motors; magnetic bearings; motor drives; direct linear drives; linear-drive system; permanent magnetic bearing; Chemical vapor deposition; Machine tools; Magnetic fields; Magnetic levitation; Microelectronics; Permanent magnet motors; Permanent magnets; Pumps; Rolling bearings; Wheels;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Electronics, Electrical Drives, Automation and Motion, 2006. SPEEDAM 2006. International Symposium on
Conference_Location
Taormina
Print_ISBN
1-4244-0193-3
Type
conf
DOI
10.1109/SPEEDAM.2006.1649786
Filename
1649786
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