Title :
First diamond FET RF power measurement on diamond quasi-substrate
Author :
Aleksov, A. ; Kubovic, M. ; Kaeb, N. ; Spitzberg, U. ; Daumiller, I. ; Bauer, T. ; Schreck, Matthias ; Stritzker, B. ; Kohn, E.
Author_Institution :
Dept. of Electron Devices & Circuits, Ulm Univ., Germany
Abstract :
Diamond is an exceptional widegap material predestined for high power high frequency electronics. However, up to now devices could only be fabricated on chips cut from synthetic single crystal stones of small size, and device performance had been restricted to small signal measurements due to severe large signal instabilities However, diamond 100-oriented quasi-substrates of single crystal quality can be grown on ceramic substrates such as SrTiO/sub 3/ using a single crystal iridium buffer layer. In this experiment we have succeeded in fabricating the first surface channel FETs (using a hydrogen induced p-type channel) on such a diamond quasi-substrate. The FETs show high electrical stability, enabling large signal and power measurements for the first time, and thus demonstrating the feasibility of diamond microwave high power electronics.
Keywords :
diamond; microwave field effect transistors; microwave power transistors; power field effect transistors; semiconductor device measurement; stability; substrates; C; C-Ir-SrTiO/sub 3/; FET RF power measurements; FET stability; SrTiO/sub 3/ ceramic substrates; diamond 100-oriented quasi-substrates; diamond FET; diamond microwave high power electronics; high power high frequency widegap materials; hydrogen induced p-type channel; large signal instabilities; single crystal iridium buffer layer; small signal measurements; surface channel FET; synthetic single crystal stones; Buffer layers; Ceramics; Crystalline materials; FETs; Hydrogen; Power measurement; Power system stability; Radio frequency; Semiconductor device measurement; Size measurement;
Conference_Titel :
Device Research Conference, 2002. 60th DRC. Conference Digest
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-7317-0
DOI :
10.1109/DRC.2002.1029588