Micro phenomena in low contact-force probing on aluminum

Author

Kataoka, Kenichi ; Itoh, Toshihiro ; Suga, Tadatomo

Author_Institution

TMS Dev. Dept., Tokyo Electron AT Ltd., Nirasaki, Japan

fYear

2005

fDate

26-28 Sept. 2005

Firstpage

259

Lastpage

264

Abstract

Electric contact phenomena in probing of aluminum electrode under low contact force have been investigated. Metallic materials of wide variety were tested to find one suitable for low contact-force probing on aluminum using fritting. In order to investigate the low-force contact phenomena, a new measurement apparatus was developed to enable the control of contact force less than 1 mN, and direct observation of the probe tip during the repeated contact measurement. Silver, gold and platinum were found to be suitable materials for probes for fritting contact, and good electric contacts more than 1,000 counts were obtained. The tip of the probe was observed by an optical microscope and adhesion of the aluminum electrode was investigated.

Keywords

adhesion; aluminium; contact resistance; electrical contacts; electrodes; gold; materials testing; optical microscopes; probes; silver; Ag; Al; Au; aluminum electrode; contact measurement; electric contact phenomena; electric contacts; fritting contact; low contact-force probing; low-force contact phenomena; measurement apparatus; metallic materials; optical microscope; Aluminum; Electrodes; Force control; Force measurement; Gold; Inorganic materials; Materials testing; Optical microscopy; Probes; Silver;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Contacts, 2005. Proceedings of the Fifty-First IEEE Holm Conference on

Print_ISBN

0-7803-9113-6

Type

conf

DOI

10.1109/HOLM.2005.1518253

Filename

1518253