DocumentCode :
2192854
Title :
Micro phenomena in low contact-force probing on aluminum
Author :
Kataoka, Kenichi ; Itoh, Toshihiro ; Suga, Tadatomo
Author_Institution :
TMS Dev. Dept., Tokyo Electron AT Ltd., Nirasaki, Japan
fYear :
2005
fDate :
26-28 Sept. 2005
Firstpage :
259
Lastpage :
264
Abstract :
Electric contact phenomena in probing of aluminum electrode under low contact force have been investigated. Metallic materials of wide variety were tested to find one suitable for low contact-force probing on aluminum using fritting. In order to investigate the low-force contact phenomena, a new measurement apparatus was developed to enable the control of contact force less than 1 mN, and direct observation of the probe tip during the repeated contact measurement. Silver, gold and platinum were found to be suitable materials for probes for fritting contact, and good electric contacts more than 1,000 counts were obtained. The tip of the probe was observed by an optical microscope and adhesion of the aluminum electrode was investigated.
Keywords :
adhesion; aluminium; contact resistance; electrical contacts; electrodes; gold; materials testing; optical microscopes; probes; silver; Ag; Al; Au; aluminum electrode; contact measurement; electric contact phenomena; electric contacts; fritting contact; low contact-force probing; low-force contact phenomena; measurement apparatus; metallic materials; optical microscope; Aluminum; Electrodes; Force control; Force measurement; Gold; Inorganic materials; Materials testing; Optical microscopy; Probes; Silver;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Contacts, 2005. Proceedings of the Fifty-First IEEE Holm Conference on
Print_ISBN :
0-7803-9113-6
Type :
conf
DOI :
10.1109/HOLM.2005.1518253
Filename :
1518253
Link To Document :
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