An intelligent vertical trench DMOS on SIMOX-substrate

Author

Vogt, F. ; Vogt, H. ; Brucker, J. ; Zimmermann, C. ; Richter, F.

Author_Institution

Fraunhofer-Inst. of Microelectron. Circuits & Syst., Duisburg, Germany

fYear

1996

fDate

20-23 May 1996

Firstpage

177

Lastpage

180

Abstract

This paper describes first results of a monolithically integrated smart power device which uses a vertical Trench-DMOS as a power switch and a signal and control circuit fabricated in a SOI-CMOS technology (SOI: silicon on insulator). The vertical dielectric isolation between the Trench-DMOS and the control circuit is formed by the SIMOX-Process (SIMOX: separation by implanted oxygen) and the lateral isolation is realized by the LOGOS technology. The self-protection of the entire device is achieved by measuring the temperature and the load current of the power transistor. The protection is provided by analog and digital CMOS circuits with a supply voltage of 15 V. This device can be used, for example, as an “intelligent” switch in a dimmer circuit for automotive application

Keywords

CMOS integrated circuits; SIMOX; integrated circuit technology; isolation technology; mixed analogue-digital integrated circuits; power integrated circuits; protection; 15 V; LOGOS technology; SIMOX substrate; SOI CMOS technology; Si; automotive application; dimmer circuit; intelligent switch; intelligent vertical trench DMOS; lateral isolation; monolithically integrated smart power device; power switch; self-protection; vertical dielectric isolation; CMOS technology; Current measurement; Dielectric measurements; Integrated circuit technology; Isolation technology; Power measurement; Power transistors; Silicon on insulator technology; Switches; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Semiconductor Devices and ICs, 1996. ISPSD '96 Proceedings., 8th International Symposium on

Conference_Location

Maui, HI

ISSN

1063-6854

Print_ISBN

0-7803-3106-0

Type

conf

DOI

10.1109/ISPSD.1996.509475

Filename

509475