Contactless electrical characterization of MMICs by device internal electrical sampling scanning-force-microscopy

Author

Bohm, C. ; Roths, C. ; Kubalek, E.

Author_Institution

Univ. Gesamthochschule Duisburg, Germany

fYear

1994

fDate

23-27 May 1994

Firstpage

1605

Abstract

For the first time a scanning force microscope based test system is used for device internal electrical characterization of monolithic microwave integrated circuits (MMIC) based on III-V-semiconductor material up to 40 GHz. Measurements on a coplanar waveguide and within a travelling wave amplifier (TWA) demonstrate the capability for a device internal function- and failure analysis of MMICs. The experimental results are completed by network analyzer measurements.<>

Keywords

III-V semiconductors; MMIC; atomic force microscopy; failure analysis; integrated circuit testing; microwave measurement; 40 GHz; III-V-semiconductor material; MMICs; SFM based test system; contactless electrical characterization; coplanar waveguide; device internal electrical characterization; device internal electrical sampling SFM; failure analysis; monolithic microwave integrated circuits; network analyzer measurements; scanning-force-microscopy; travelling wave amplifier; Circuit testing; Contacts; Integrated circuit measurements; Integrated circuit testing; MMICs; Materials testing; Microscopy; Microwave devices; Microwave integrated circuits; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1994., IEEE MTT-S International

Conference_Location

San Diego, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-1778-5

Type

conf

DOI

10.1109/MWSYM.1994.335266

Filename

335266