Title :
Contactless electrical characterization of MMICs by device internal electrical sampling scanning-force-microscopy
Author :
Bohm, C. ; Roths, C. ; Kubalek, E.
Author_Institution :
Univ. Gesamthochschule Duisburg, Germany
Abstract :
For the first time a scanning force microscope based test system is used for device internal electrical characterization of monolithic microwave integrated circuits (MMIC) based on III-V-semiconductor material up to 40 GHz. Measurements on a coplanar waveguide and within a travelling wave amplifier (TWA) demonstrate the capability for a device internal function- and failure analysis of MMICs. The experimental results are completed by network analyzer measurements.<>
Keywords :
III-V semiconductors; MMIC; atomic force microscopy; failure analysis; integrated circuit testing; microwave measurement; 40 GHz; III-V-semiconductor material; MMICs; SFM based test system; contactless electrical characterization; coplanar waveguide; device internal electrical characterization; device internal electrical sampling SFM; failure analysis; monolithic microwave integrated circuits; network analyzer measurements; scanning-force-microscopy; travelling wave amplifier; Circuit testing; Contacts; Integrated circuit measurements; Integrated circuit testing; MMICs; Materials testing; Microscopy; Microwave devices; Microwave integrated circuits; System testing;
Conference_Titel :
Microwave Symposium Digest, 1994., IEEE MTT-S International
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-1778-5
DOI :
10.1109/MWSYM.1994.335266
