Gecko inspired Electrostatic Chuck

Author

Berengueres, Jose ; Urago, Masataka ; Saito, Shigeki ; Tadakuma, Kenjiro ; Meguro, Hiroyuki

Author_Institution

Dept. of Int. Dev. Eng., Tokyo Inst. of Technol., Tokyo

fYear

2006

fDate

17-20 Dec. 2006

Firstpage

1018

Lastpage

1023

Abstract

We introduce a climbing system, inspired by gecko foot that uses Electrostatic Chuck (ESC) in place of Van der Waals interaction. Electrostatic chucks are currently used in wafer foundries to pick-up and move delicate thin semiconductor wafers. The properties of ESC make it an interesting adhesion force for wall mobility applications. However the great dependency of current ESCs\´ adhesion force on the surface roughness of the substrate renders them ineffective in "normal-roughness" walls. By combining ESC adhesion with gecko\´s foot-hair surface-roughness adaptability function we propose a device for wall mobility applications.

Keywords

adhesion; biomimetics; electrostatic actuators; electrostatics; mobile robots; surface roughness; van der Waals forces; Van der Waals interaction; adhesion force; climbing system; foot-hair surface-roughness adaptability function; gecko inspired electrostatic chuck; semiconductor wafers; wafer foundries; wall mobility applications; Adhesives; Biomimetics; Electrodes; Electrons; Electrostatics; Foot; Hair; Robots; Rough surfaces; Surface roughness; ESC; Van der Waals force; climbing; distributed adhesion; electrostatic chuck; gecko; surface roughness; wall;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Biomimetics, 2006. ROBIO '06. IEEE International Conference on

Conference_Location

Kunming

Print_ISBN

1-4244-0570-X

Electronic_ISBN

1-4244-0571-8

Type

conf

DOI

10.1109/ROBIO.2006.340368

Filename

4142005