DocumentCode
2196178
Title
An improved model to design integrated optical pressure sensors
Author
Manfrin, S.K. ; César, A.C. ; Silva, M. T Camargo
Author_Institution
Dept. of Electr. Eng., Sao Paulo Univ., Brazil
Volume
1
fYear
1995
fDate
24-27 Jul 1995
Firstpage
87
Abstract
An improved model for the design of multilayered diaphragm type integrated optical pressure sensors is reported. In this new model the multilayered diaphragm structure is based on an equivalent single-layer which is simulated by using the finite-difference method (FDM). Numerical results of the halfwave pressure as a function of the diaphragm length show good agreement with experimental data
Keywords
finite difference methods; integrated optics; optical sensors; pressure sensors; diaphragm length; experimental data; finite-difference method; halfwave pressure; integrated optical pressure sensors; model; multilayered diaphragm; pressure sensors design; Glass; Integrated optics; Optical design; Optical devices; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Optoelectronics Conference, 1995. Proceedings., 1995 SBMO/IEEE MTT-S International
Conference_Location
Rio de Janeiro
Print_ISBN
0-7803-2674-1
Type
conf
DOI
10.1109/SBMOMO.1995.509603
Filename
509603
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