Title :
An improved model to design integrated optical pressure sensors
Author :
Manfrin, S.K. ; César, A.C. ; Silva, M. T Camargo
Author_Institution :
Dept. of Electr. Eng., Sao Paulo Univ., Brazil
Abstract :
An improved model for the design of multilayered diaphragm type integrated optical pressure sensors is reported. In this new model the multilayered diaphragm structure is based on an equivalent single-layer which is simulated by using the finite-difference method (FDM). Numerical results of the halfwave pressure as a function of the diaphragm length show good agreement with experimental data
Keywords :
finite difference methods; integrated optics; optical sensors; pressure sensors; diaphragm length; experimental data; finite-difference method; halfwave pressure; integrated optical pressure sensors; model; multilayered diaphragm; pressure sensors design; Glass; Integrated optics; Optical design; Optical devices; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Silicon;
Conference_Titel :
Microwave and Optoelectronics Conference, 1995. Proceedings., 1995 SBMO/IEEE MTT-S International
Conference_Location :
Rio de Janeiro
Print_ISBN :
0-7803-2674-1
DOI :
10.1109/SBMOMO.1995.509603
