DocumentCode
2196367
Title
Theory, design and operation of surface generated acoustic wave sensors
Author
Vetelino, J.F. ; Andle, J.C. ; Falconer, R.S.
Author_Institution
Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA
fYear
1994
fDate
23-27 May 1994
Firstpage
505
Abstract
Surface generated acoustic waves (SGAW) excited in a piezoelectric medium provide an attractive technology to realize a family of microsensors which are sensitive, portable, cheap and small. In this paper two SGAW microsensors namely, the surface acoustic wave gas sensor and the acoustic plate mode biosensor are described. Results indicate that these sensors are extremely sensitive to the measurand of interest.<>
Keywords
acoustic transducers; biosensors; gas sensors; portable instruments; surface acoustic wave devices; acoustic plate mode biosensor; microsensors; piezoelectric medium; portable SGAW microsensors; surface acoustic wave gas sensor; surface generated acoustic wave sensors; Acoustic measurements; Acoustic sensors; Acoustic waves; Biosensors; Gas detectors; Microsensors; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1994., IEEE MTT-S International
Conference_Location
San Diego, CA, USA
ISSN
0149-645X
Print_ISBN
0-7803-1778-5
Type
conf
DOI
10.1109/MWSYM.1994.335445
Filename
335445
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