Title :
Linear motor using stacked piezoelectric ceramics
Author :
Huang, Weiqing ; Wang, Yin ; Pan, Song
Author_Institution :
Precision Driving Lab., Nanjing Univ. of Aeronaut. & Astronaut., Nanjing, China
Abstract :
To meet the need of advanced manufacturing technology, a piezoelectric actuator with high resolution was developed in this work. The principle of exciting the driving tip to vibrate elliptically was analyzed in detail. A prototype was fabricated to validate the analysis. Testing results shows that this prototype can obtain a speed of 16.6mm/sec in the sinuous exciting voltage signal with peak to peak value 100V, 50V offset and frequency 5.5 kHz. By adopting stacked piezoelectric ceramics, this motor has a stable output performance over a wide range of exciting sinuous voltage signal. Besides, this piezoelectric motor also has high resolution due to quasi-static operation mode.
Keywords :
integrated circuit manufacture; linear motors; piezoceramics; piezoelectric actuators; piezoelectric motors; advanced manufacturing technology; frequency 5.5 kHz; integrate circuit manufacturing technology; linear motor; piezoelectric actuator; piezoelectric motor; quasi-static operation mode; sinuous voltage signal; stacked piezoelectric ceramics; voltage 100 V; voltage 50 V; Acoustics; Ceramics; Prototypes; Rotors; Signal resolution; Stators; Vibrations; actuator; manufacturing technology; stacked piezoelectric ceramics;
Conference_Titel :
Electronics, Communications and Control (ICECC), 2011 International Conference on
Conference_Location :
Ningbo
Print_ISBN :
978-1-4577-0320-1
DOI :
10.1109/ICECC.2011.6067757