Microwave Properties of AgTa0.5Nb0.5O3 Thin Film Varactors on Various Substrates

Author

Kim, Jang-Yong ; Grishin, Alexander M.

Author_Institution

R. Inst. of Technol., Stockholm

fYear

2006

fDate

July 30 2006-Aug. 3 2006

Firstpage

360

Lastpage

363

Abstract

AgTa_0.5Nb_0.5O₃ (ATN) 400 nm thick films have been sintered by pulsed laser deposition technique on LaAIO₃ (001), sapphire (Al₂O₃-011_2, r-cut) single crystal substrates and Corning 7059 glass. Photolithography and metal lift-off technique were used to fabricate tunable coplanar waveguide interdigital capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAIO₃ capacitors demonstrated the highest tunability (~5.8%@20GHz), ATN/Glass showed the best flat dispersion (-3.9%) and ATN/ AI₂O₃ showed the lowest loss tangent (~0.06@20GHz) in the microwave range from 1 to 40 GHz.

Keywords

ceramic capacitors; coplanar waveguide components; lanthanum compounds; microwave devices; photolithography; pulsed laser deposition; sapphire; silver compounds; tantalum compounds; thin film devices; varactors; AgTa_0.5Nb_0.5O₃; Al₂O₃; Corning 7059 glass; G-S-G microwave probe; LaAlO₃; ceramic thin film; frequency 1 GHz to 40 GHz; metal lift-off technique; microwave network analyzer; microwave properties; on-wafer test; photolithography; pulsed laser deposition technique; sintering; thin film varactors; tunable coplanar waveguide interdigital capacitors; voltage tunable key devices; Capacitors; Glass; Laser sintering; Lithography; Masers; Niobium; Optical pulses; Pulsed laser deposition; Thick films; Waveguide lasers; Ceramic thin film; Coplanar waveguides; Scattering parameters; Voltage tunable devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of ferroelectrics, 2006. isaf '06. 15th ieee international symposium on the

Conference_Location

Sunset Beach, NC

ISSN

1099-4734

Print_ISBN

978-1-4244-1331-7

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2006.4387906

Filename

4387906