Title :
Life Cycle Inventory of a CMOS Chip
Author :
Boyd, Sarah ; Dornfeld, David ; Krishnan, Nikhil
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA
Abstract :
A life cycle inventory for comparative assessment of assorted semiconductor device types is assembled using a library of process step-related information. In this paper, we present the structure of this library of energy use, material inputs and emissions data at the process equipment-level and facilities-scale, normalized per wafer. Selected results from a case study of a 130nm node CMOS device are presented and compared with a previous study of a comparable chip. Comparative production impacts of 6-layer and 8-layer CMOS devices are shown
Keywords :
CMOS integrated circuits; design for environment; product life cycle management; 130 nm; CMOS chip; design for environment; environmental management; life cycle assessment; life cycle inventory; process step-related information; Chemical processes; Chemical vapor deposition; Cooling; Environmental management; Libraries; Manufacturing processes; Pollution measurement; Semiconductor device manufacture; Semiconductor materials; Water resources;
Conference_Titel :
Electronics and the Environment, 2006. Proceedings of the 2006 IEEE International Symposium on
Conference_Location :
Scottsdale, AZ
Print_ISBN :
1-4244-0351-0
DOI :
10.1109/ISEE.2006.1650071
