Title :
Energy Use in Nanoscale Manufacturing
Author :
Zhang, Teresa W. ; Boyd, Sarah ; Vijayaraghavan, Athulan ; Dornfeld, David
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA
Abstract :
This paper presents an overview of key nanoscale manufacturing technologies, and qualitatively examines their fundamental process requirements with respect to energy demand. The processes requirements are related to semiconductor manufacturing, where applicable, and gaps in our understanding of these processes on the production scale are identified as goals for the research community. Finally, the paper proposes a framework for the systematic analysis of energy use in nanoscale manufacturing processes
Keywords :
integrated circuit manufacture; nanotechnology; energy demand; energy use; nanoscale manufacturing; semiconductor manufacturing; Electron beams; Energy efficiency; Etching; Lithography; Manufacturing processes; Nanoscale devices; Pulp manufacturing; Resists; Semiconductor device manufacture; Ultraviolet sources;
Conference_Titel :
Electronics and the Environment, 2006. Proceedings of the 2006 IEEE International Symposium on
Conference_Location :
Scottsdale, AZ
Print_ISBN :
1-4244-0351-0
DOI :
10.1109/ISEE.2006.1650074
