DocumentCode
2197295
Title
Energy Use in Nanoscale Manufacturing
Author
Zhang, Teresa W. ; Boyd, Sarah ; Vijayaraghavan, Athulan ; Dornfeld, David
Author_Institution
Dept. of Mech. Eng., California Univ., Berkeley, CA
fYear
2006
fDate
8-11 May 2006
Firstpage
266
Lastpage
271
Abstract
This paper presents an overview of key nanoscale manufacturing technologies, and qualitatively examines their fundamental process requirements with respect to energy demand. The processes requirements are related to semiconductor manufacturing, where applicable, and gaps in our understanding of these processes on the production scale are identified as goals for the research community. Finally, the paper proposes a framework for the systematic analysis of energy use in nanoscale manufacturing processes
Keywords
integrated circuit manufacture; nanotechnology; energy demand; energy use; nanoscale manufacturing; semiconductor manufacturing; Electron beams; Energy efficiency; Etching; Lithography; Manufacturing processes; Nanoscale devices; Pulp manufacturing; Resists; Semiconductor device manufacture; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and the Environment, 2006. Proceedings of the 2006 IEEE International Symposium on
Conference_Location
Scottsdale, AZ
ISSN
1095-2020
Print_ISBN
1-4244-0351-0
Type
conf
DOI
10.1109/ISEE.2006.1650074
Filename
1650074
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