Title :
An integrated antenna excited by piezoelectric transducers
Author :
Weber, Robert J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Eng., Iowa State Univ., Ames, IA, USA
Abstract :
This paper presents the structure of and measurement data from an L-band integrated antenna on a silicon wafer. The antenna is excited from a front side piezoelectric transducer which receives energy generated by another piezoelectric transducer on the back side of the wafer. The design allows a low EMI susceptibility structure to be built and integrated on a chip and demonstrates one method of 3D integrated circuits
Keywords :
MMIC; antenna phased arrays; electromagnetic interference; waveguide antenna arrays; 3D integrated circuits; EMI susceptibility structure; L-band; MMICs; front side piezoelectric transducer; integrated antenna; phased antenna arrays; Antenna arrays; Electromagnetic interference; Fabrication; Filters; Frequency; Impedance; Phased arrays; Piezoelectric transducers; Testing; Wafer bonding;
Conference_Titel :
Circuits and Systems, 1997. Proceedings of the 40th Midwest Symposium on
Conference_Location :
Sacramento, CA
Print_ISBN :
0-7803-3694-1
DOI :
10.1109/MWSCAS.1997.666227
