DocumentCode
2198318
Title
Deposition of thin film ceramics and ceramic nanocomposites by inductively coupled plasma assisted hybrid chemical/physical vapor deposition
Author
Wen Jin Meng ; Bao Feng ; Dong Mei Cao
Author_Institution
Louisiana State University
fYear
2000
fDate
4-7 June 2000
Firstpage
88
Lastpage
88
Abstract
Summary form only given.
Keywords
Ceramics; Cities and towns; Implants; Materials science and technology; Nanocomposites; Physics; Plasma immersion ion implantation; Plasma materials processing; Sputtering; Steady-state;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on
Conference_Location
New Orleans, LA, USA
ISSN
0730-9244
Print_ISBN
0-7803-5982-8
Type
conf
DOI
10.1109/PLASMA.2000.854553
Filename
854553
Link To Document