The DARPA compact superconducting X-ray lithography source features

Under DARPA sponsorship, a compact superconducting X-ray lithography source (SLS) is being designed and built by the Brookhaven National Laboratory (BNL). This source is optimized for lithography work for submicron high-density computer chips, and is about the size of a billiard table (1.5 m*4.0 m). This machine has a racetrack configuration with two 180 degrees bending magnets. The machine will have 18 photon ports which would deliver light peaked at a wavelength of 10 AA. The authors describe the major features of this device. The commercial machine will be equipped with a fully automated user-friendly control system, major features of which are already working on a compact warm dipole ring at BNL. This ring has normal dipole magnets with dimensions identical to the SXLS device, and has been successfully commissioned.<>