DocumentCode :
2200883
Title :
Hybrid Methodology for Development of MEMS
Author :
Pryputniewicz, Ryszard J. ; Marinis, Ryan T. ; Klempner, Adam R. ; Hefti, Peter
fYear :
2006
fDate :
April 25-27, 2006
Firstpage :
606
Lastpage :
613
Keywords :
Fabrication; Failure analysis; Marine technology; Mechanical engineering; Micromechanical devices; Packaging; Software tools; Telephony; Testing; Visualization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Position, Location, And Navigation Symposium, 2006 IEEE/ION
Print_ISBN :
0-7803-9454-2
Type :
conf
DOI :
10.1109/PLANS.2006.1650651
Filename :
1650651
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2200883
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