Investigation of Design and Vibration Modes of Low-Voltage Driven RF MEME Capacitive Switch for Millimeter Distributed Phase Shifter

Author

He, Xun-jun ; Qun Wu ; Jin, Bo-shi ; Song, Ming-Xin ; Yin, Jing-Hua

Author_Institution

Sch. of Electron. & Inf. Technol., Harbin Inst. of Technol.

fYear

2006

fDate

14-17 Nov. 2006

Firstpage

1

Lastpage

3

Abstract

This paper reports on design and analysis of electrostatic driven RF MEMS capacitive switches for radio-frequency (RF) applications. To reduce the driven voltage of MEMS switches, the mechanical designs of low spring-constant hinge shape beam structure are presented. The displacement distribution, driven voltage and mechanical vibration modes of the switch using the beam are analyzed by using IntelliSuitetrade software simulation tool for an optimization design, the results demonstrated that the driven voltage is lower than 2 V and the frequencies of all vibration modes are higher 12 kHz

Keywords

electrostatic devices; microswitches; millimetre wave phase shifters; IntelliSuitetrade software simulation tool; displacement distribution; driven voltage; electrostatic driven RF MEMS capacitive switch; mechanical vibration modes; microelectromechanical system; millimeter distributed phase shifter; optimization design; radio-frequency application; spring-constant hinge shape beam structure; Application software; Electrostatic analysis; Fasteners; Microswitches; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Vibrations; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

TENCON 2006. 2006 IEEE Region 10 Conference

Conference_Location

Hong Kong

Print_ISBN

1-4244-0548-3

Electronic_ISBN

1-4244-0549-1

Type

conf

DOI

10.1109/TENCON.2006.343677

Filename

4142255