Investigation of Design and Vibration Modes of Low-Voltage Driven RF MEME Capacitive Switch for Millimeter Distributed Phase Shifter

This paper reports on design and analysis of electrostatic driven RF MEMS capacitive switches for radio-frequency (RF) applications. To reduce the driven voltage of MEMS switches, the mechanical designs of low spring-constant hinge shape beam structure are presented. The displacement distribution, driven voltage and mechanical vibration modes of the switch using the beam are analyzed by using IntelliSuitetrade software simulation tool for an optimization design, the results demonstrated that the driven voltage is lower than 2 V and the frequencies of all vibration modes are higher 12 kHz