Title :
Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage
Author :
Van de Wal, Marc ; Van Baars, Gregor ; Sperling, Frank ; Bosgra, Okko
Author_Institution :
Mechatronics Res., Philips Centre for Ind. Technol. (CFT), Eindhoven, Netherlands
Abstract :
Conventional PID-like SISO controllers are still common in industrial servo systems, but the ever increasing performance requirements call for advanced MIMO control. This paper presents μ feedback controller design for high-precision wafer stage motion. Weighting filters-are proposed to straightforwardly and effectively impose performance and uncertainty specifications. The performance has been experimentally verified and compared with conventional multiloop SISO control
Keywords :
MIMO systems; multivariable control systems; servomechanisms; MIMO control; high-precision wafer stage; industrial servo systems; multiloop SISO control; multivariable μ feedback controller design; performance requirements; weighting filters; Adaptive control; Bandwidth; Control systems; Electrical equipment industry; Filters; Industrial control; MIMO; Mechatronics; Servomechanisms; Uncertainty;
Conference_Titel :
Decision and Control, 2001. Proceedings of the 40th IEEE Conference on
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-7061-9
DOI :
10.1109/.2001.981125
