Title :
Investigation of on-chip high temperature annealing of PMOS dosimeters
Author :
Kelleher, Ann ; Lane, William ; Adams, Leonard
Author_Institution :
Nat. Microelectron. Res. Centre, Cork, Ireland
Abstract :
Radiation sensitive pMOS dosimeters can measure only to a maximum dose which is determined by the type, sensitivity and irradiation conditions of the RADFET. On reaching the maximum dose, the dosimeters normally have to be replaced. The aim of this work is to study the feasibility of using on-chip poly-resistor heaters to anneal the dosimeters back to their pre-irradiation threshold voltage. This study shows that on-chip heating is a viable option to achieve post-irradiation annealing, and that the fading characteristics obtained agree with those of oven annealing from a previous study which was carried out on the NMRC RADFETs
Keywords :
MOSFET; annealing; dosimeters; semiconductor counters; RADFET; fading; high temperature annealing; on-chip poly-resistor heater; radiation sensitive pMOS dosimeter; threshold voltage; Annealing; Microelectronics; Ovens; Plasma temperature; Resistors; Semiconductor device measurement; Space heating; Space vehicles; Temperature sensors; Threshold voltage;
Conference_Titel :
Radiation and its Effects on Components and Systems, 1995. RADECS 95., Third European Conference on
Conference_Location :
Arcachon
Print_ISBN :
0-7803-3093-5
DOI :
10.1109/RADECS.1995.509821