Design, Modeling and Simulation of a Closed-Loop Controller for a Dual Backplate MEMS Capacitive Microphone

Author

Kadirvel, Karthik ; Martin, David T. ; Liu, Jian ; Fox, Robert ; Sheplak, Mark ; Cattafesta, Louis N. ; Nishida, Toshikazu

Author_Institution

Univ. of Florida, Gainesville

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

87

Lastpage

90

Abstract

This work reports the design, modeling and simulation of an all electrostatic, analog closed-loop controller for a dual backplate MEMS capacitive microphone. In this work, a Simulink model which incorporates the key dynamics of the sensor, interface circuit, and sense and feedback non-linearities has been developed. Sinusoidal and step response of the open and closed loop systems were simulated. The closed loop system has a loop gain of 38 dB and a phase margin of 42deg. The simulations predict that the maximum diaphragm displacement for a m drop test is attenuated from 6.2 pm to 7.1 times 10^-2 pm (38 dB attenuation).

Keywords

closed loop systems; control nonlinearities; feedback; micromechanical devices; microphones; open loop systems; telecommunication control; Simulink model; dual backplate MEMS capacitive microphone; electrostatic analog closed-loop controller; feedback nonlinearities; interface circuit; maximum diaphragm displacement; open loop systems; step response; Circuit simulation; Closed loop systems; Electrostatics; Feedback circuits; Gain; Micromechanical devices; Microphones; Nonlinear dynamical systems; Open loop systems; Predictive models;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388342

Filename

4388342