Simulation on Optimizing Design of XeCl Excimer Laser

By using theoretical simulation and orthogonal optimum design, the pumping circuit parameters and gas composition parameters, which influence the output characteristics of XeCl excimer laser, were optimized by orthogonal-optimum design and computer simulation. Meanwhile we analyzed the pump circuit parameters and gas composition on the effect to the XeCl excimer laser output characteristics and the best laser operating parameters. The simulation results show that: when the charging voltage was 26 KV, the inductance is 4 nH, the inflation pressure is 4 × 105 Pa, and the gas ratio is Ne / Xe / HCl = 875/15/1.5, the better beam output can be obtained: the single pulse energy was 267mJ, the pulse width was 25.45ns.