Ultra Low Power MOX Sensors with ppb-Level VOC Detection Capabilities

Author

Elmi, I. ; Zampolli, S. ; Cozzani, E. ; Passini, M. ; Pizzochero, G. ; Cardinali, G.C. ; Severi, M.

Author_Institution

CNR -Nat. Res. Council, Bologna

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

170

Lastpage

173

Abstract

This paper deals with the development of state-of-the-art metal oxide semiconductor (MOX) gas sensors based on ultra-low power (ULP) consumption micro-machined hot plates. Several gas sensors have been fabricated by means of a wafer level technological process, and deeply functionally and morphologically characterized. Details on device design and on the fabrication processes are provided. Results of functional characterizations towards different gases at different working conditions will be reported. The capability of detecting volatile organic compounds (VOC) down to few parts per billion (ppb), will be shown. Outcomes of morphological sensing layer characterization will show the well controlled nano-structured thin film of tin oxide.

Keywords

MIS devices; gas sensors; metal oxide semiconductor; micromachined hot plates; ppb-level VOC detection; ultra low power MOX gas sensors; volatile organic compounds; Dielectric thin films; Energy consumption; Fabrication; Gas detectors; Gases; Platinum; Sensor arrays; Silicon; Temperature sensors; Volatile organic compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388363

Filename

4388363