Precise Velocity Control of the Air Floating Gantry Type Precision Stage with the Acceleration Feedback Compensation

Author

Karikita, Ichiro ; Mayeda, Hirokazu

Author_Institution

Toray Eng. Co., Ltd., Otsu

fYear

2006

fDate

14-17 Nov. 2006

Firstpage

1

Lastpage

4

Abstract

Recently, the gantry type precision stage and its precise velocity control are required in the field of inspection machine and slit nozzle coater of the flat panel display, since the glass substrate becomes large. In this paper, the velocity control scheme with the acceleration feedback compensation is proposed and examined on a miniature gantry. It is shown that the acceleration PI (proportion and integral) feedback compensation is effective for reducing the velocity fluctuation and the range of deviation between the legs due to the input disturbance

Keywords

PI control; acceleration; compensation; feedback; flat panel displays; inspection; precision engineering; production equipment; velocity control; acceleration PI feedback compensation; acceleration proportion-integral feedback compensation; air floating gantry; flat panel display; gantry type precision stage; glass substrate; machine inspection; miniature gantry; slit nozzle coater; velocity control scheme; velocity fluctuation reduction; Acceleration; Feedback; Flat panel displays; Fluctuations; Glass; Inspection; Leg; Low-frequency noise; Rails; Velocity control;

fLanguage

English

Publisher

ieee

Conference_Titel

TENCON 2006. 2006 IEEE Region 10 Conference

Conference_Location

Hong Kong

Print_ISBN

1-4244-0548-3

Electronic_ISBN

1-4244-0549-1

Type

conf

DOI

10.1109/TENCON.2006.344192

Filename

4142380