Title :
Transient behavior of self-assembled quantum dots formed by atomic layer epitaxy technique
Author :
Park, Young Min ; Park, Young Ju ; Kim, Kwang Moo ; Shin, Jae Cheol ; Song, Jin Dong ; Lee, Jung N. ; Yoo, Kwn-Ho
Author_Institution :
Nano Device Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
We investigated a transient behavior of InGaAs self-assembled quantum dots (SAQD) formed by atomic layer epitaxy technique (ALE). Performing some cycles of InAs/GaAs alternate source supply between InGaAs layers, InGaAs dots-in-a-well structures were spontaneously grown. In order to elucidate the growth mechanism of dots-in-a-well structure, premature SAQD was intentionally prepared by controlling the cycles of source supply. Through the measurement of photoluminescence, not only the discrete quantum well state but also broad emission band was observed, indicating that a mixed structure of QW and QD was existed in a quantum well. The mixed behaviors of the premature QDs were studied in detail using temperature dependence of photoluminescence measurements.
Keywords :
III-V semiconductors; atomic layer epitaxial growth; gallium arsenide; indium compounds; photoluminescence; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum dots; ALE; InGaAs; InGaAs layers; InGaAs self assembled quantum dots; QD structure; QW structure; atomic layer epitaxy method; emission band; growth mechanism; photoluminescence; temperature dependence; Assembly; Atomic layer deposition; Atomic measurements; Epitaxial growth; Gallium arsenide; Indium gallium arsenide; Photoluminescence; Quantum dots; Temperature dependence; US Department of Transportation;
Conference_Titel :
Compound Semiconductors, 2003. International Symposium on
Print_ISBN :
0-7803-7820-2
DOI :
10.1109/ISCS.2003.1239956