Integrated temperature and humidity sensor based MEMS

Author

Fang, Zhen ; Zhao, Zhan ; Wu, Yu ; Zhang, Bojun ; Wang, Yizhong

Author_Institution

State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China

fYear

2004

fDate

21-25 June 2004

Firstpage

84

Lastpage

87

Abstract

MEMS-based integrated temperature and humidity sensor has the advantages of low weight, small size, low cost, easy integrity and is a highly advanced apparatus of identity, reliability, easy production. The feasibility of thermal conductivity method used to measure humidity and structure of the integrated temperature and humidity sensor are analyzed in this paper, and provides the measuring methods in detail. We mainly focus on measuring result of the humidity part, and verify the excellent performance of the integrated temperature and humidity sensor.

Keywords

humidity measurement; humidity sensors; micromechanical devices; temperature measurement; temperature sensors; MEMS-based humidity sensor; MEMS-based integrated temperature sensor; humidity measurement; micro-air-bridge; thermal conductivity method; Atmospheric measurements; Conductivity measurement; Costs; Humidity measurement; Micromechanical devices; Pollution measurement; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; Thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Acquisition, 2004. Proceedings. International Conference on

Print_ISBN

0-7803-8629-9

Type

conf

DOI

10.1109/ICIA.2004.1373325

Filename

1373325