Title :
Integrated temperature and humidity sensor based MEMS
Author :
Fang, Zhen ; Zhao, Zhan ; Wu, Yu ; Zhang, Bojun ; Wang, Yizhong
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China
Abstract :
MEMS-based integrated temperature and humidity sensor has the advantages of low weight, small size, low cost, easy integrity and is a highly advanced apparatus of identity, reliability, easy production. The feasibility of thermal conductivity method used to measure humidity and structure of the integrated temperature and humidity sensor are analyzed in this paper, and provides the measuring methods in detail. We mainly focus on measuring result of the humidity part, and verify the excellent performance of the integrated temperature and humidity sensor.
Keywords :
humidity measurement; humidity sensors; micromechanical devices; temperature measurement; temperature sensors; MEMS-based humidity sensor; MEMS-based integrated temperature sensor; humidity measurement; micro-air-bridge; thermal conductivity method; Atmospheric measurements; Conductivity measurement; Costs; Humidity measurement; Micromechanical devices; Pollution measurement; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; Thermal conductivity;
Conference_Titel :
Information Acquisition, 2004. Proceedings. International Conference on
Print_ISBN :
0-7803-8629-9
DOI :
10.1109/ICIA.2004.1373325
