DocumentCode
2205191
Title
Optimization and test of a calorimetric silicon flow sensor
Author
Gao, Donghui ; Qin, Ming ; Cheng, Haiyang
Author_Institution
Key Lab. of MEMS of Educ. Minist., Southeast Univ., Nanjing, China
fYear
2004
fDate
21-25 June 2004
Firstpage
99
Lastpage
102
Abstract
In this paper, the influence of the geometry design on the output of the sensor is given. The sensitivity and the range of the flow velocity are two key features for the calorimetric sensor considered here. An optimized geometry of the flow sensor is obtained in this paper. Lastly, a sensor is fabricated using the optimum geometry and the experimental results are compared to the simulation results. A good agreement between them is achieved.
Keywords
calorimetry; geometry; microsensors; temperature sensors; calorimetric silicon flow sensor; flow velocity; optimized geometry; thermal simulation; Fluid flow measurement; Geometry; Sensor phenomena and characterization; Silicon; Solid modeling; Temperature distribution; Temperature measurement; Temperature sensors; Testing; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Information Acquisition, 2004. Proceedings. International Conference on
Print_ISBN
0-7803-8629-9
Type
conf
DOI
10.1109/ICIA.2004.1373329
Filename
1373329
Link To Document