Computation and measurement of electron circulation patterns in phase space

Author

Kortshagen, U. ; Heil, B.

Author_Institution

Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA

fYear

2000

fDate

4-7 June 2000

Firstpage

166

Abstract

Summary form only given. We present numerical results and measurements of electron fluxes in phase space in a low-pressure inductively coupled plasma (ICP). Numerical results were obtained with a two-dimensional plasma model which resolves the ICP structure in radial and axial directions. The electron Boltzmann equation is solved for this spatially two-dimensional problem in the two-term and the effective field approximation. The electron flux pattern at constant energy are obtained from the anisotropy component of the electron distribution function (EDF). Measurement of the EDF were performed with a Langmuir probe mechanism.

Keywords

plasma simulation; plasma transport processes; ICP structure; Langmuir probe mechanism; anisotropy component; axial direction; effective field approximation; electron Boltzmann equation; electron circulation patterns; electron distribution function; electron flux pattern; electron fluxes; low-pressure inductively coupled plasma; numerical results; phase space; radial direction; two-dimensional plasma model; two-term approximation; Anisotropic magnetoresistance; Boltzmann equation; Distribution functions; Electrons; Energy resolution; Extraterrestrial measurements; Performance evaluation; Phase measurement; Plasma measurements; Spatial resolution;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on

Conference_Location

New Orleans, LA, USA

ISSN

0730-9244

Print_ISBN

0-7803-5982-8

Type

conf

DOI

10.1109/PLASMA.2000.854867

Filename

854867