DocumentCode
2205682
Title
Precise aperture control of oxidized GaAs surface emitting laser using in-situ monitered oxidation process
Author
Sai, Hironobu ; Koyarna, F. ; Iga, Kenichi
Author_Institution
Rohm Co. Ltd.
fYear
2003
fDate
25-27 Aug. 2003
Firstpage
239
Lastpage
240
Keywords
Apertures; Gallium arsenide; Infrared surveillance; Laser theory; Monitoring; Optical control; Oxidation; Plasma temperature; Surface emitting lasers; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Compound Semiconductors, 2003. International Symposium on
Print_ISBN
0-7803-7820-2
Type
conf
DOI
10.1109/ISCS.2003.1239994
Filename
1239994
Link To Document