Title :
Measurement of resonant microbeam pressure sensors
Author :
Chen, Deyong ; Cui, Dafu
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China
Abstract :
Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors´ output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.
Keywords :
closed loop systems; data acquisition; micromachining; open loop systems; pressure sensors; close-loop data-acquisition system; electro-thermal excitation; lock-in amplification technology; microbeam resonant pressure sensor; open-loop measuring system; Frequency measurement; Piezoresistance; Platinum; Pressure measurement; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon; Stress; Voltage;
Conference_Titel :
Information Acquisition, 2004. Proceedings. International Conference on
Print_ISBN :
0-7803-8629-9
DOI :
10.1109/ICIA.2004.1373357
